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800 and 500 Series Upgrades
 [ Service ] [ 800 and 5000 Series Upgrades ] [ MultiFab-Targetrack-Omnichuck ]

Solitec's traditional 800 and 5000 Series process systems have dozens of upgrade options that adapt to new process needs,  increase reliability, and provide additional years of productivity.

 

800 Series Upgrade Options

(Detailed brochure available)

  • AC filter and circuit breaker
  • Autocoat™ II (Radial sweep resist dispense)
  • Backlit LCD display
  • Bake cap up/down upgrade
  • Bake plate vacuum upgrade
  • BDC (brushless DC) motor upgrade
  • Brushed motor scrub vacuum upgrade
  • Dual wafer conversion kits
  • Fragile wafer handling kit
  • High temperature bake retrofit kit
  • Loader (indexer) lead screw upgrade
  • Loader pics upgrade
  • Low Mass chucks
  • Low voltage upgrade
  • Multi-pass software
  • Patented Controlled Turbulence Process Bowl
  • PEBR (programmable top EBR)
  • Remove static charge from high pressure Di dispense
  • Resist pump crossflow retrofit kit
  • Scrub brush spin motor upgrade
  • Small cartridge dispense system retrofit kit
  • Solvent pump
  • Spindle assembly-bearing cover
  • Spindle housing seal
  • Stainless steel loader vacuum sensors (2)
  • Temperature controller upgrade

5000 Series Upgrade Options

(Detailed brochure available)

  • Automatic Process Bowl cover up/down
  • Automatic Resist Arm in/out for model 5110-C
  • Backside wash upgrade
  • BDC (brushless DC) motor upgrade
  • Home servo
  • Low mass chuck
  • Low Voltage (24VDC) upgrade
  • Newly designed PVA brushes for scrubbers
  • Process Bowl Exhaust Plenum
  • Resist pump crossflow retrofit kit
  • Resist volume check
  • SCDS (small cartridge dispense system) retro-fit package
  • Scrub brush motor upgrade
  • Scrub Vac motor purge (for brushed motors)
  • Spindle bearing cover
  • Tunnel Bowl (Patented)
  • Wafer loading paddles
  • X86 Microcomputer upgrade

For information on Solitec Wafer Processing, Inc. System upgrades contact:
  David Bradley
1-800-648-4040
408-955-9939

 sales@solitec-wp.com

We will be happy to fax or e-mail upgrade brochures or answer any
specific questions on Solitec 800 and 5000 series upgrades!

 

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