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The 800 "Solitrac Series

Cartridge  Dispense System

 Solitec  pump


The S800 & SoliTrac Series provides automatic
(cassette to cassette) spin processing for wafers/substrates  and irregular shaped substrates of up to 150mm diagonal dimensions.

 The SoliTrac utilizes a PC microcomputer with flat panel  display. Optional SECS communication.




Features

Processes:

Coat, Develop, Scrub/Jet, Bake, Metal Lift-Off and Etch

Coat:

Solitec Pump (Teflon Diaphragm), Pressurized Cartridge Dispense, both with fixed dispense arm or Solitec's exclusive AUTOCOAT  dispense arm (programmable). Most O.E.M. Pump Supported

Develop:

Aspirated Atomized Spray, Pressurized Fan Spray, Solitec's exclusive Ultrasonic OPTIMIST Spray, Harmonic Jet/Metal Lift-off  Strippers (stepper motor controlled), plus optional temperature controlled chemical supply

Vapor Prime:

Wafer Pre-coat priming for increased adhesion. Standard temperature configuration to 250 C

Chill:

Stabilizes wafer temperature after post exposure and Vapor Prime baking.

Bake:

Up to 250C. Proximity and Contact Bake.
0.5
C to 125C; 0.5% 125-250C
PID Temperature Control in 1C Increments

Elevated
TempBake:

Hot Plate Temperature Uniformity
0.5
C at 100C
1.2
C at 300C
2.1% at 350
C
2.3% at 400
C
2.6% at 430
C

Cartridge  Dispense System

SWP,  Inc. s Cartridge Dispense System allows the End User  to change out
coating materials in minutes.

Pneumatic  operated and stand alone mounting so that it can be used
on virtually any apply system.

 

New  and Used Semiconductor Equipment - Solitec pump

Available  with remote gauge and regulator panel or as all in one packaging.
Picture above has separate gauge / regulator panel.

Sketch  to right shows gauges and regulators mounted onto the pump.

Pneumatic  Resist Pump by Solitec. Works on virtually any apply system.

Disclaimer:  All specifications, features, services and products are  subject to change at anytime.


 

 

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