The 10000 Series provides for
automatic spin processing, cassette to cassette with two, three or four process stations in single or dual lane configurations. For wafers/substrates
up to 200mm diagonal dimensions. PC controlled with SVGA color monitor display.
10000 in "dual lane" configuration
Coat, Develop, HMDS Vapor Prime, Chill and Bake
Solitec Pump (Teflon
diaphragm), Pressurized Cartridge Dispense, both with Solitec's exclusive Autocoat Dispense Arm (programmable)
Aspirated Atomized Spray, Pressurized Fan Spray, Solitec's exclusive Ultrasonic Optimist Spray, Harmonic
Jet/metal lift-off Strippers (stepper motor controlled), plus optional Temperature controlled Chemical Supply
Wafer Pre-coat priming for
increased adhesion. Standard temperature configuration to 250°C
temperature after post exposure and Vapor Prime baking.