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10000 Series


The 10000 Series provides for automatic spin processing, cassette to cassette with two, three or four  process stations in single or dual lane configurations. For wafers/substrates up to 200mm diagonal dimensions. PC controlled with SVGA color monitor display.

10000 in "dual lane" configuration




Coat, Develop, HMDS Vapor Prime, Chill and Bake


Solitec Pump (Teflon diaphragm), Pressurized Cartridge
Dispense, both with Solitec's exclusive Autocoat
Dispense Arm (programmable)


Aspirated Atomized Spray, Pressurized Fan Spray, Solitec's exclusive Ultrasonic Optimist Spray, Harmonic Jet/metal lift-off  Strippers (stepper motor controlled), plus optional Temperature controlled Chemical Supply

Vapor Prime:

Wafer Pre-coat priming for increased adhesion. Standard temperature configuration to 250C


Stabilizes wafer temperature after post exposure and Vapor Prime baking.



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