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10000 Series
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The 10000 Series provides for automatic spin processing, cassette to
cassette with two, three or four process stations in single or dual lane configurations. For wafers/substrates up to 200mm diagonal dimensions. PC
controlled with SVGA color monitor display. |
10000 in "dual lane" configuration |
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Features
Processes: |
Coat, Develop, HMDS Vapor Prime, Chill and Bake |
Coat: |
Solitec Pump (Teflon diaphragm), Pressurized Cartridge
Dispense, both with Solitec's exclusive Autocoat
Dispense Arm (programmable) |
Develop: |
Aspirated Atomized Spray, Pressurized Fan Spray, Solitec's exclusive Ultrasonic
Optimist Spray, Harmonic Jet/metal lift-off Strippers (stepper motor controlled), plus optional Temperature controlled Chemical Supply |
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Vapor Prime: |
Wafer Pre-coat priming for increased adhesion. Standard temperature configuration to 250°C
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Chill: |
Stabilizes wafer temperature after post exposure and Vapor Prime baking. |
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