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Product Index

Wafer Fabrication Equipment

Automated "Cluster" Systems- Advanced Volume Production

  • SWP 200 - Random access robotic wafer track systems for processing of 75-200mm wafers.
  • OptiTRAC™- Random access robotic wafer track systems for processing of 75-150mm wafers.

Automated Track Systems- Advanced Production

  • FlexiFab™- Automatic wafer track systems for production processing of 75-200mm wafers and 6x6'' substrates.
  • 10000 Series- Automatic (cassette to cassette) track systems for production processing of 75-200mm wafers.
  • S800 Series- Automatic (cassette to cassette) track systems for production processing of 25-150mm wafers.

Semi-Automatic Systems- Research and Pilot Production

  • Stand Alone Bake- Desktop Bake Station for 75-200mm.
  • 5000 and 7000 Series- Semi-Automatic (manual load/unload) coating, developing and scrubbing systems. The 50XX series provides processing of single substrate up to 225mm diagonal. The 70XX system provides processing of single wafers up to 12'' and substrates up to 500mm diagonal dimensions.

Quartz Cleaning Systems- "QCS" Automated Quartz Cleaning Equipment

  • QCS- Horizontal and Vertical (LPCVD/Furnace Quartz Tube) and Bell Jar (RIE/Etcher/Asher) acid cleaning systems. All systems are available with quartz accessory cleaning chambers. Custom configurations available.

Upgrades and Refurbishment

  • FlexiFab™- Factory Refurbished, Automatic wafer track systems for production processing of 75-200mm wafers and 6x6'' substrates.
  • WaferTrac™ / MicroTrac™- Factory Refurbished, Automatic wafer track systems for processing of 75-150mm diameter wafers.
  • Multi P/V™ Factory Refurbished, Upgraded and new versions of the MultiFab system.
  • MultiFab™- Factory refurbished automated wafer track systems for production processing of 75-150mm wafers.
  • TargeTrack™- Service and upgrades of installed units in the field. Automated track systems for production processing 75-150mm.
  • OmniChuck™- Service and Upgrades of installed units in the field. Automated track systems for production processing 75-150mm.
  • 5000/800 Series Upgrades- Upgrade options for the popular 5000 and 800 series.

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