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Semiconductor Equipment - New and Refurbished Wafer Processing Systems


We provide new and used semiconductor equipment, and we offer semiconductor equipment refurbishing services for MTI, GCA, ISI Track and Solitec. Please see below some of the products we offer:

Automated "Cluster" Systems- Advanced Volume Production

  • OptiTRAC- Random access robotic wafer track systems for processing of 75-150mm wafers.

Automated Track Systems- Advanced Production

  • S800 Series- Automatic (cassette to cassette) track systems for production processing of 25-150mm wafers.
  • FlexiFab ™- Automatic wafer track systems for production processing of 75-200mm wafers and 6x6'' substrates.

Semi-Automatic Systems- Research and Pilot Production

  • 5000 and 7000 Series- Semi-Automatic (manual load/unload) coating, developing and scrubbing systems. The 50XX series provides processing of single substrate up to 225mm diagonal. The 70XX system provides processing of single wafers up to 12'' and substrates up to 500mm diagonal dimensions.

    A newer
    Model L110 replacing the series 5000 is now available. Click Here for more details.
     
  • Stand Alone Bake- Desktop Bake Station for 75-200mm.

Quartz Cleaning Systems- "QCS" Automated Quartz Cleaning Equipment

  • QCS- Horizontal and Vertical (LPCVD/Furnace Quartz Tube) and Bell Jar (RIE/Etcher/Asher) acid cleaning systems. All systems are available with quartz accessory cleaning chambers. Custom configurations available.

Upgrades and Refurbishment

  • 5000/800 Series Upgrades- Upgrade options for the popular 5000 and 800 series.
  • FlexiFab ™- Factory Refurbished, Automatic wafer track systems for production processing of 75-200mm wafers and 6x6'' substrates.
  • WaferTrac / MicroTrac™- Factory Refurbished, Automatic wafer track systems for processing of 75-150mm diameter wafers.
  • Multi P/V ™ Factory Refurbished, Upgraded and new versions of the MultiFab system.
  • MultiFab- Factory refurbished automated wafer track systems for production processing of 75-150mm wafers.
  • TargeTrack- Service and upgrades of installed units in the field. Automated track systems for production processing 75-150mm.
  • OmniChuck- Service and Upgrades of installed units in the field. Automated track systems for production processing 75-150mm.

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