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Solitec 800 Series
Solitec 5000 Series
Solitec Bake Modules
Solitec Quartz Cleaners
Solitec 10000 series
B&L Matrix, Inc.
7222 Highway 9
Felton, CA 95018-9327
P)  408-770-3978


Product Highlights
Solitec pump
New and Used Semiconductor Equipment
Backside wash
Photoresist coater
Soft bake
Apply tracks
Flat type chucks
Programmable temperature control
Resist coater
Backside rinse
Contact bake
Hard bake
O'ring type chucks
Photoresist apply
Spin coater
Programmable exhaust
Proximity bake
Recessed chucks
Cartridge dispense
Centering devices
Metal Lift Off
Photoresist processing systems
Resist apply
Vapor Prime

IC Fabrication Multipv Semiconductor Equipment Semiconductor Pumps Refurbished Semiconductor Equipment Semi Conductor Industry Semi Conductor Manufacturer Semiconductor Coating Semiconductor Processing Equipment Semiconductor Processing Series 10 Used Semiconductor Equipment


MTI Coaters MTI Developers MTI Scrubbers MTI spinners MTI spin coaters FlexiFab Coaters FlexiFab Developers FlexiFab scrubbers Millipore pump IDI pump Trebor pump


We are committed to providing innovative, reliable, and cost effective manufacturing equipment for semiconductor manufacturing.  A series of semiautomatic systems for your R&D and  multiple choices of cassette to cassette systems for your  production.

 We provide new and Refurbished Solitec,  MTI, GCA, and OptiTrac semiconductor manufacturing equipment. 

With decades of spin technology background, we are sure to find a solution for any unique requirement.

We are committed to prompt professional service whether your requirements are for a single spare part or a complete system. Our customer base serves over 1000 world wide customers, including some of the largest semiconductor manufacturing companies in the world as well as many Universities and R&D Centers. We will continue to invest in product development to improve our product both in technology and productivity.

Technologies and Processes:

Coating – Positive, Negative, Polyimide, Polymers, adhesives, etc. 
               NOTE:   If you want to spin process your coating material, we'll help you find a way.

Positive Develop – Flat fan spray, puddle, Atomized-aspiration and Ultrasonic

Solvent Develop – Atomized-Aspirated

Cleaning – High pressure Jet spray &/or brush scrub

Bake – Cassette to cassette and Stand Alone. Ambient to 450 °C.

Chill (cooling) plates. Water jacket and thermoelectric junction devices.

HMDS Vapor Prime:  Stand alone and in-line cassette to cassette systems.

NH3 Image Reversal -   Stand alone and in-line cassette to cassette systems.

UV in line Cure for image reversal. Flood exposure of  wafer at >200mJ/cm.

Metal Lift-off – Semi-automatic and cassette to cassette.

Horizontal Quartz Cleaners for cleaning Horizontal tubes, horizontally.

Vertical Quartz Cleaners for cleaning Horizontal tubes, vertically.

Vertical Quartz Tube Cleaners

Quartz Bell Jar cleaners


Disclaimer: All specifications, features, services and products
are subject to change at anytime.

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Product Collage

GCA – WaferTrac
GCA - MicroTrac
MTI - FlexiFab
MTI - MulitFab
ISI - OptiTrac

WT Services, Inc.
98 Sterling Street
Room 405
Clinton MA 01510
P)  1-866-503-7571
P)  978-302-1852